'oxygen-impervious' is a Modern English compound formed from the noun 'oxygen' and the adjective 'impervious'. 'Oxygen' ultimately comes from French 'oxygène' (coined in the 18th century), itself based on Greek 'oxys' meaning 'sharp' or 'acid' and '-genes' meaning 'producer'. 'Impervious' derives from Latin 'impervius' (in- + pervius), where 'pervius' comes from 'per' + 'via' meaning 'passable by way'.

'oxygen' was coined in Modern European scientific usage (French 'oxygène') in the late 18th century and became the English noun 'oxygen'; 'impervious' entered English via Medieval/Latin forms (Latin 'impervius' → Old/Medieval French/Medieval Latin → Middle English 'impervious') and the compound 'oxygen-impervious' is a later, technical Modern English formation combining the two words.

Initially, the element name 'oxygen' (from French/Greek roots) carried the sense 'acid-producer' in early chemistry, but it later became the standard name for the chemical element; 'impervious' originally meant 'not passable' or 'not allowing passage', a meaning that has largely remained stable and in the compound now specifically applies to oxygen.