'atomize' originates from Greek, specifically the word 'atomos', where 'a-' meant 'not' and 'tomos' meant 'cut'. The verb-forming suffix '-ize' comes from Greek '-izein' via Late Latin and French.

'atomos' passed into Late Latin and then into French as 'atomiser' (or related forms), and from French/Modern Latin the English verb 'atomize' was formed in the modern period.

Initially related to the idea of making things 'indivisible' or referring to indivisible particles ('atomos'), it evolved to mean 'to break into very small parts' or 'to convert into a spray/vapor'; figurative senses of complete destruction developed later.