'archwizard' originates from Modern English, specifically the combining form 'arch-' (from Greek 'arkhē'/'arkhos') and the word 'wizard' (from Old English elements related to 'wīs' meaning 'wise'), where 'arch-' meant 'chief/principal' and 'wīs' meant 'wise'.

'wizard' changed from Old English (e.g. 'wīs' + agentive formation, later Middle English forms like 'wysard'/'wysard') and eventually became modern English 'wizard'; the prefix 'arch-' (from Greek via Late Latin/Old French combining use) was attached in later English to produce the compound 'arch-wizard'/'archwizard'.

Initially, the components signified 'chief/leading wise one'; over time this developed into the current sense of 'the most powerful or supreme wizard'.