'archdeity' originates from Modern English, specifically formed from the prefix 'arch-' (from Greek 'arkhós') and the word 'deity' (from Latin 'deitas' via Old French 'deité'), where 'arch-' meant 'chief, principal' and 'deity' meant 'god'.

'archdeity' is a compound formed by combining Greek-derived prefix 'arch-' (through Medieval/Modern English formation) with 'deity' (which evolved from Latin 'deitas' and Old French 'deité'); these elements were combined in English to produce the modern compound 'archdeity'.

Initially the components meant 'chief' (arch-) and 'god' (deity); assembled as 'archdeity' the meaning became and has remained 'the chief or supreme god.'